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Testing Report of the EBSD detector at the LV SEM (Hitachi S-3500SE) with INCA Programme

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Academic year: 2022

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However at the LV SEM, the further EBSD mapping from the designed area could not be carried out due to the INCA PC memory trouble, as shown in the below figure.. The system is low

After RAM increasing, the EBSD mapping was tested and performed by using the maximum INCA EBSD resolution setting (i.e. scanning pixel size as1.58 square-micro).. The EBSD

As shown in the below test (a) at SEM 800X, where ROI width as 50 micron (268 pixels), the left origin was at 0.100 micron which could be calculated to represent by 0.540 pixel and